This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication. The volume gathers twelve contributions presented at the 5th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Ilmenau, Germany in November 2020. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology. The conference was organized under the patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science).

This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication. The volume gathers twelve contributions presented at the 5th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Ilmenau, Germany in November 2020. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology. The conference was organized under the patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science).

Compliant mechanisms and actuators are growing in importance due to their benefits in robotics, medical technology, sensor applications, or in handling compressible objects. This book helps to understand the mechanical behavior of compliant systems. Suggested classifications and different modeling methods are shown that allow for the description of compliant systems.

Compliant mechanisms are able to transfer movements and forces. These systems can be fabricated monolithically and are miniaturizable, friction free, require little maintenance and can also be used to create complex pathways. This book is devoted to models for compliant mechanisms or parts of mechanisms, demonstrating their application in gripper technology, robot technology, valve technology, and medical technology, among others."

The essence of the conceptual design is getting the innovative projects or ideas to promise the products with best performance. It has been proved that the theory of inventive problem solution (TRIZ) is a systematic methodology for innovation. Passively compliant robotic joint design as an engineering example is illuminated in this book to show the significance and approaches of applying TRIZ into getting the creative conceptual design ideas. The main goal is to design the compliant robotic joint with conductive silicone rubber elements as internal sensors. The sensor-elements can operate as absorbers of excessive external collision force instead of springs and dampers. Therefore, this joint presents one type of safe robotic mechanisms with an internally measuring system. The sensor-elements were made by press-curing from carbon-black filled silicone rubber. The experimental results show that the greatest advantage of this material lies in its high stretchiness and high compression velocity. A new method is presented for detecting the direction of the robotic joint rotation when subjected to an external collision force.